短语词组短语pumping g speed 泵速high pumping -speed cryopump 大抽速低温泵Max Pumping Speed 最大气量effective pumping speed 有效抽速Vacuum pumping speed 真空抽速High Pumping Speed 抽气速气高Pumping Speed MM 进气口径pumping speed s coefficient 抽速系数 返回 pumping speed