短语词组短语sputter -etching 溅射刻蚀ion sputter etching 溅射刻蚀reactive sputter etching [电子]反应溅射刻蚀reactive sputter etching system 反应性溅镀蚀刻系统Model NGI3000 -Sputter Etching System 完整性NGI3000离子源 返回 sputter etching